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MultiMEMS - Infineon's MPW Service

ANNOUNCEMENTS:
  • 18.11.2008: The 2nd STIMESI workshop on MEMS and microsystems research will be held at Berlin-Brandenburg Academy of Sciences, Germany. Attendance of the workshop is free of charge.
  • 19.11.2008: A free of charge, 2-day STIMESI course on the MPW process offered by SensoNor will be held at TU Berlin, Germany.
  • 21.11.2008: A microBUILDER workshop on microsystems for drug delivery devices will be held at MEDICA / COMPAMED 2008, Düsseldorf, Germany. Attendance of the workshop is free of charge.

Infineon Technologies SensoNor, or briefly SensoNor, offers its proprietary manufacturing MPW (Multi-Project Wafer) process in silicon and borosilicate glass wafers under the MultiMEMS generic name.

The MultiMEMS MPW process is based on SensoNor's well-established bulk silicon and glass micromachining technologies.

Sponsors

The MultiMEMS service is partially sponsored by the EUROPRACTICE programme through the microBUILDER and STIMESI projects.