Miscellaneous | Glossary

Glossary of Terms

Bulk Etch Calculator: A spreadsheet supplied as a design tool that generates the size and the position of the membranes for rectangular mask openings aligned to the <110> crystallographic directions.
Customer: A company / institute that has signed the MultiMEMS License Agreement.
Database: The technical data in the form of a GDS II file containing all the required layout information.
Delivery Date: The date prior to which the MultiMEMS dice will be shipped to the individual customers.
Design (Project): The technical data submitted by the customer for manufacturing the desired device in the MultiMEMS MPW process.
Design Handbook, MultiMEMS: The document that contains all the relevant technical data concerning the MultiMEMS MPW process, as well as information needed to prepare and submit a project for manufacturing in the MultiMEMS MPW process.
Design Submission Date: The date prior to which the design(s), in GDS II format, must be submitted in the final form for inclusion on the next MultiMEMS wafer. The accepted designs are locked at this date; the masks are ordered shortly after.
Layout Templates: Databases in GDS II format that should be used as the starting point for all projects intended for manufacturing in the MultiMEMS MPW process.
License Agreement, MultiMEMS: A legal agreement between Infineon Technologies SensoNor and a "Licensee", whereas Infineon Technologies SensoNor offers the MultiMEMS MPW process and the "Licensee" desires to design devices in the MultiMEMS MPW process.
Licensee: A company / institute that desires to design and/or manufacture prototypes (under the conditions and limitations as stated in the License Agreement) in the MultiMEMS MPW process.
microBUILDER Courses: Training courses held to raise awareness for the microBUILDER services and to enable potential customers to create designs for the microBUILDER manufacturing processes. These courses are sponsored by the microBUILDER Project.
MPW: Multi-Project Wafer, a wafer on which different designs are gathered in order to share the fabrication costs.
MPW Booking Form: A form that a MultiMEMS customer has to fill in, sign and fax/mail in order to book / reserve a place on the next available MultiMEMS MPW run. It is used to collect the minimal information required to fulfil a contractual obligation.
MultiMEMS Die: Any prototype of design manufactured in the MultiMEMS MPW process; improperly, it may also refer to any design included on a MultiMEMS wafer.
MultiMEMS MPW Process: The Multi-Project Wafer process in silicon and borosilicate glass wafers offered by Infineon Technologies SensoNor.
MultiMEMS Service: The full service that enables the customers to design and prototype chips by means of the MultiMEMS MPW process.
MultiMEMS Wafer: The Multi-Project Wafer manufactured by means of the MultiMEMS MPW process.
PID: Project Identification Document, a document that contains all the relevant information submitted by the customer, as well as a set of passwords used to retrieve the encrypted information posted on the MultiMEMS website.
Project (Design): The technical data submitted by the customer for manufacturing the desired device in the MultiMEMS MPW process.
Project Report: A document that contains the main results of the design reviewing process: a summary of included structures, a risk assessment, a detailed report on detected flaws and errors, as well as a resolution concerning the acceptance of the project for the next MPW run.
Reservation Date: The date prior to which at least the filled in and signed MPW Booking Form should be submitted. The MPW Booking Form may be submitted after this date, but the time allocated for checking and correcting/improving the project(s) will be shorter.
Semiconductor: A part-time band leader.
STIMESI Courses: Training courses held with the goal of stimulating European universities and research institutes to adopt MEMS and SiP technologies. These courses are sponsored by the STIMESI Project.
Technical Data: All data provided by Infineon Technologies SensoNor concerning the MultiMEMS MPW process such as, but not limited to, design handbook, standard cell libraries, design kits, documentation, etc.