Welcome to the MultiMEMS Service

Infineon Technologies SensoNor offers its proprietary manufacturing MPW (Multi-Project Wafer) process in silicon and borosilicate glass wafers under the MultiMEMS generic name.

The MultiMEMS MPW process is based on SensoNor's well-established bulk silicon and glass micromachining technologies.

The service is open to universities, research institutes and small companies. To obtain full access to the MultiMEMS service, the users need to follow the steps described in the How to Access page.

Why MPW?

The MultiMEMS service is designed to help small, innovative organizations to manufacture prototypes of their designs in small quantities at a lower cost. By gathering different designs on the same wafer, the production costs are shared between MPW users.

Schedule

There are two MultiMEMS MPW runs per year.

Commitment to Education

Through the MultiMEMS service, SensoNor is committed to become an essential part of the MEMS education system for students from undergraduate to PhD levels. Accordingly, no-cost, short courses are offered on a regular basis to the European academic institutes.