Offer | MultiMEMS Add-ons
MultiMEMS Add-ons
The MultiMEMS Add-ons are complementary processes developed by Infineon Technologies SensoNor to suit the more demanding applications.
To offer microsystems with enhanced functionality, an additional set of compatible add-on processes is being developed by the partners of the microBUILDER consortium.[1]
Add-on processes must be ordered separately and only after discussing such a possibility with the MultiMEMS MPW co-ordinator at SensoNor.
DRIE Add-on Process
The DRIE Add-on Process is developed to etch 50 µm deep channels and cavities in the silicon substrate for devices handling liquids and other demanding microfluidic applications.
Deep channels and glass/silicon reaction chambers, in combination with heaters and sensing elements (available directly through the MultiMEMS MPW process), are the most common features of the lab-on-a-chip devices.
The DRIE add-on process and its restrictions of use are described in the Design Handbook, Section 7-2.
 DRIE. Courtesy of SINTEF. © 2007 Infineon Technologies SensoNor and SINTEF. |
Remarks
1. All enquires concerning the microBUILDER add-ons, whether for the MultiMEMS process or not, should be e-mailed to microBUILDER support: support@microbuilder.org.