Offer | Applications
Applications
The MultiMEMS MPW process is suitable for applications based on:
Piezoresistive detection;
Thermal excitation;
Thermo-pneumatic actuation.
The MultiMEMS MPW process is not suitable for:
Capacitive detection;
Electrostatic excitation or actuation.
A wide variety of MEMS applications can be manufactured by means of the MultiMEMS MPW process. A few examples are listed below:
- Absolute and relative
Pressure Sensors; - Inertial devices, such as Accelerometers, force sensors, angular-rate sensors;
- Physical Gas Sensors;
- Heat and radiation sensors, such as Thermopiles and bolometers;
- Energy harvesters and Resonators;
- Microfluidic Devices, such as flow sensors, pumps and valves;
- Biosensors and other biomedical devices;
- Optical devices, such as micromirrors.
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