Offer | Applications | Pressure Sensors
Pressure Sensors
The MultiMEMS MPW process allows designs for absolute and relative pressure sensors, with inlets from either side, as illustrated in the cross-sectional views below.
Cross-Sectional Views:
Absolute pressure sensor with bottom inlet
 © 2007 Infineon Technologies SensoNor. |
Absolute pressure sensor with top inlet
 © 2007 Infineon Technologies SensoNor. |
Relative pressure sensor with bottom inlets
 © 2007 Infineon Technologies SensoNor. |
Relative pressure sensor with top inlets
 © 2007 Infineon Technologies SensoNor. |
Relative pressure sensor with top and bottom inlets
 © 2007 Infineon Technologies SensoNor. |
The diaphragms can be either thick or thin. The thick diaphragms with buried piezoresistors are suitable for long-term stable, large range pressure sensors. The thin diaphragms with surface resistors are suitable for high sensitivity pressure sensors.
Apart from the standard rectangular, thick or thin membranes, the MultiMEMS process also allows for thin circular membranes and thin bossed membranes.
Another design possibility is to manufacture thin diaphragms with small perforations that allow slow ventilation, for high-frequency pressure sensors or microphones.
Examples of Pressure Sensors
The absolute pressure sensors pictured below have been developed by Infineon Technologies SensoNor for medical applications. The devices, featuring long-term stable, buried piezoresistors, are suitable for implantable, wireless medical systems.
 Absolute pressure sensors. © 2007 Infineon Technologies SensoNor. |
The pressure sensors pictured below have been developed by SINTEF as parts of various gas detection systems, such as 
NetGas. The devices feature high sensitive surface piezoresistors and bossed membranes.
 Pressure sensors. Courtesy of SINTEF. © 2006 SINTEF. |