Offer | Applications | Thermopiles
Thermopiles
The MultiMEMS MPW process allows designs for various heat and temperature sensors, such as bolometers and thermopiles.
The thermopiles are devices for heat sensing, usually employed in infrared thermometers and physical gas sensors. In the most common configuration, a thermopile is a set of thermocouples connected in series, operating with both cold and hot junctions, based on Seebeck effect.[1]
In a different approach, devices structured like regular pressure sensors can be used as heat sensors. In such cases, the deformation of the silicon membrane is induced by thermal forces.
Examples of Thermopiles
The thermopile pictured below has been developed by SINTEF as a component of various gas detection systems, such as 
NetGas. The device uses a set of bimetallic strips to deform a thin silicon membrane in the presence of heat.
 Thermopile. Courtesy of SINTEF. © 2006 SINTEF. |
Remarks
1. The thermopiles based on Seebeck effect require thermocouple materials - such as copper/constantan, polysilicon/gold, etc. - that must be ordered as
Add-ons through the microBUILDER consortium.